Pattern generator

Details Pattern generator Pattern generator

H - Electricity

01

L

356/192, 327/1.4

H01L 21/428 (2006.01) B23K 26/08 (2006.01) B23K 26/12 (2006.01) B41M 5/24 (2006.01) G03F 1/08 (2006.01) G03F 7/20 (2006.01) H01L 21/30 (2006.01)

Patent

CA 1175958

- 1 - Abstract: A pattern generator locates a workpiece to be machined into a desired pattern shape in a vacuum. This workpiece is irradiated with a laser beam condensed to a fine point. The beam is scanned to depict the desired pattern shape, whereby the workpiece is directly machined in conformity therewith. Used as a workpiece is a shading film, e.g., chromium film deposited on a transparent glass substrate. By irradiating it in a vacuum, the irradiated parts of the film are vaporized to fabricate a shading mask pattern of good quality. The process is faster and of higher precision than prior art methods.

391814

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