Ph adjusted nonionic surfactant-containing alkaline cleaner...

Details Ph adjusted nonionic surfactant-containing alkaline cleaner... Ph adjusted nonionic surfactant-containing alkaline cleaner...

C - Chemistry, Metallurgy

23

G

C23G 1/14 (2006.01) C11D 1/66 (2006.01) C11D 3/02 (2006.01) C11D 3/30 (2006.01) H01L 21/306 (2006.01) H01L 21/64 (2006.01)

Patent

CA 2146036

Aqueous alkaline cleaning solutions for cleaning microelectronic substrates and maintaining substrate surface smoothness comprise a metal ion free base, a nonionic surfactant and a component to reduce or control the pH of the cleaning solution to a pH within the range of from about pH 8 to about pH 10.

Affiliated with

Also associated with

Rating

Ph adjusted nonionic surfactant-containing alkaline cleaner... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ph adjusted nonionic surfactant-containing alkaline cleaner..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ph adjusted nonionic surfactant-containing alkaline cleaner... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1974865