Photo-mask

G - Physics – 11 – B

Patent

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356/166

G11B 7/26 (2006.01) G03F 1/00 (2006.01) G03F 1/14 (2006.01)

Patent

CA 1315023

3825 - 14 - ABSTRACT OF THE DISCLOSURE A photo-mask comprises a light-permeable substrate, a plurality of light-shielding films that are disposed on the substrate, the light-shielding films forming a mask pattern, and a light-permeable protective film that is disposed over the surface of the substrate including the light-shielding films so as to protect the light-shielding films.

578870

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