Plasma-resistant polymeric material, preparation thereof,...

Details Plasma-resistant polymeric material, preparation thereof,... Plasma-resistant polymeric material, preparation thereof,...

G - Physics

03

F

117/183, 402/3

G03F 7/26 (2006.01) G03F 7/038 (2006.01)

Patent

CA 1266148

PLASMA-RESISTANT POLYMERIC MATERIAL, PREPARATION THEREOF, AND USE THEREOF ABSTRACT Plasma-resistant polymeric materials are prepared by reacting a polymeric material containing reactive hydrogen functional groups with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material, such as hexamethylcyclotrisilazane.

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