Plasma x-ray tube, for the x-ray pre-ionisation of gas lasers

Details Plasma x-ray tube, for the x-ray pre-ionisation of gas lasers Plasma x-ray tube, for the x-ray pre-ionisation of gas lasers

H - Electricity

01

J

313/23, 345/38

H01J 35/00 (2006.01) H01J 3/02 (2006.01) H01J 17/40 (2006.01) H01J 33/00 (2006.01) H01S 3/09 (2006.01) H01S 3/0971 (2006.01) H05G 2/00 (2006.01)

Patent

CA 1312908

20365-2937 Abstract In a preferred application for pre-ionising TE lasers, in particular excimer lasers, a plasma X-ray tube, which can be designated as a one-chamber ionising tube, has an extended, box- like housing with a U-shaped hollow cathode arranged in the interior of the housing, this hollow cathode also being elongated, the open side of which faces the X-ray target in the form of a gas-tight foil. Between the X-ray target and the hollow cathode there is a long wire-shaped starting electrode. When a positive voltage or a voltage pulse is applied to this starting electrode an electrical field is formed around it, and under the influence of this, because of the ambient radiation, electrons that are present are forced onto a long, spiral path and gas atoms are ionised. Electron avalanches form and lead to initiation of the wire discharge. When the accelerator voltage, which is typically 60 kV and 120 kV maximum, is applied to the hollow cathode low- pressure plasma, ions are extracted and accelerated against the hollow cathode. When the ions impact, secondary electrons are emitted from the hollow cathode and accelerated in the opposite direction, so that the electron beam forms and when this strikes the X-ray target, X-ray retarding radiation is generated. The plasma X-ray tube is suitable, fundamentally, as an electron gun, with a suitable electron-beam permeable configuration of a foil that covers the window opening in the target retaining wall and serves as an electron window.

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