B - Operations – Transporting – 24 – D
Patent
B - Operations, Transporting
24
D
B24D 11/00 (2006.01) B24B 1/00 (2006.01) B24B 37/04 (2006.01) B24D 3/28 (2006.01) B24D 13/14 (2006.01) B27N 3/18 (2006.01)
Patent
CA 2441419
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
L'invention concerne un tampon à polir qui présente un corps comprenant des fibres intégrées dans une matrice formée par réaction de précurseurs polymériques. Les fibres délimitent des interstices, et les précurseurs remplissent la quasi totalité des interstices avant la fin de la réaction. Le tampon peut comprendre, sur sa surface de polissage, une fine couche de fibres libres. Un segment d'au moins une partie des fibres libres est intégré dans le corps adjacent du polymère et des fibres. Les fibres peuvent être séparées ou se présenter sous la forme d'une bande continue tissée ou non tissée.
Billings Scott Clayton
Chen Shyng-Tsong
Davis Kenneth M.
Gilbride David S.
Hsu Oscar Kai Chi
Freudenberg Nonwovens Ltd. Partnership
Gowling Lafleur Henderson Llp
International Business Machines Corporation
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