Pressure sensing cell using brittle diaphragm

Details Pressure sensing cell using brittle diaphragm Pressure sensing cell using brittle diaphragm

G - Physics

01

L

26/201, 73/3

G01L 7/08 (2006.01) G01L 9/00 (2006.01) H01G 5/16 (2006.01)

Patent

CA 1235922

PRESSURE SENSING CELL USING BRITTLE DIAPHARGM ABSTRACT OF THE DISCLOSURE A capacitive sensing cell is adapted for manufacture in a batch process, and uses a substrate or base from a rigid insulating material such as glass and a diaphragm assembly of a brittle semiconductor. The diaphragm assembly and the substrate are anodically bonded together. A very shallow recess is formed on either the diaphragm or the substrate to accommodate a deposited capacitor plate. Two such assemblies are connected together and the assembly is filled with noncompressible fluid to slightly bow the diaphragms away from the substrates. Differential pressure between the diaphragm assemblies is sensed by detecting the relative positions of the two diaphragms.

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