Process for continuously depositing a layer of a solid...

Details Process for continuously depositing a layer of a solid... Process for continuously depositing a layer of a solid...

C - Chemistry, Metallurgy

03

C

32/23, 117/81

C03C 17/245 (2006.01) C03C 17/00 (2006.01) C23C 16/453 (2006.01) H05B 3/84 (2006.01)

Patent

CA 1136007

ABSTRACT By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600°C which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two lateral curtains being constituted by another naturally gaseous reactant or reactant diluted in a gas. The gaseous products of the reaction issuing from the nozzle are compelled to flow above a predetermined region of the substrate and these products are evacuated by suction by means of channels disposed at the extremities of this region of the substrate and a pump to which the channels are connected.

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