Process for defined etching of substrates

Details Process for defined etching of substrates Process for defined etching of substrates

G - Physics

03

C

G03C 8/24 (2006.01) G03C 8/28 (2006.01) G03F 7/07 (2006.01) H05K 1/09 (2006.01) H05K 3/00 (2006.01) H05K 3/06 (2006.01) H05K 3/10 (2006.01)

Patent

CA 2050629

PE-0212 TITLE PROCESS FOR DEFINED ETCHING OF SUBSTRATES ABSTRACT A process is described for defined etching of holes using a silver mask formed by silver diffusion transfer imaging.

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