Process for depositing a compound oxide superconducting thin...

Details Process for depositing a compound oxide superconducting thin... Process for depositing a compound oxide superconducting thin...

H - Electricity

01

L

H01L 39/24 (2006.01) B05D 5/12 (2006.01) C23C 14/08 (2006.01) C23C 14/22 (2006.01) C23C 14/28 (2006.01)

Patent

CA 2094791

Abstract of the Disclosure: A compound oxide superconducting thin film is deposited by a laser deposition while irradiating an auxiliary laser beam passing in the vicinity of the deposition surface of the substrate, in parallel to the deposition surface. Thus, a compound oxide superconducting thin film having a good superconducting property cam be deposited at a low substrate temperature.

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