Process for etching holes

Details Process for etching holes Process for etching holes

C - Chemistry, Metallurgy

09

K

149/20

C09K 13/04 (2006.01) C04B 41/53 (2006.01) C04B 41/91 (2006.01)

Patent

CA 1101765

- PROCESS FOR ETCHING HOLES Abstract of the Disclosure A method for etching at least one aperture having a defined crystallographic geometry in single crystals which includes masking the crystal to protect predetermined por- tions thereof from being etched, and then anisotropically etching with a mixture of sulfuric acid and phosphoric acid.

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