Processing apparatus and method and elevator mechanism for...

Details Processing apparatus and method and elevator mechanism for... Processing apparatus and method and elevator mechanism for...

B - Operations, Transporting

65

G

270/176

B65G 65/36 (2006.01) H01L 21/677 (2006.01)

Patent

CA 1269408

ABSTRACT OF THE DISCLOSURE Methods and apparatus for transferring work- pieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are incrementally lowered as the individual workpieces are removed from one cassette and delivered to the other cassette. Such indexing of the cassettes is achieved by a single elevator mechanism adapted to support both of the cassettes such that they are vertically and horizontally offset relative to each other.

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