Quantitative lense analysis technique

Details Quantitative lense analysis technique Quantitative lense analysis technique

G - Physics

01

M

73/53

G01M 11/02 (2006.01) G03F 7/20 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1310205

Abstract of the Disclosure A method and apparatus is provided to quantitively characterize a lense or optical system as to best focus position at various locations of the lense as well as to determine the curvature or focal surface, and the relative depth of focus of the various locations. A test vehicle is provided having an array of object groups, each object group being comprised of a small object having a size about equal to the resolution limit of the lense or optical system and a large object having a size substantially larger than the resolution limit of the lense or optical system, the groups being separated by opaque areas. The test vehicle is interposed in the lense path and the focal length set at a position which will resolve the large object but not the small object on an image sensor. The sensor is moved orthogonally with respect to the lense and the focal length changed and the object group projected again on the sensor. These steps are repeated successively until both large and small object images are resolved, and further continued thereafter until only the large object is resolved. A series of large and small images are produced for each object group, and the median point of the small image series for each object group represents the best focal distance for the location of the lense corresponding to that object group. BU9-87-024 -

563039

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