Reflective spatial light modulator

Details Reflective spatial light modulator Reflective spatial light modulator

G - Physics

02

B

G02B 7/182 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2472349

A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro-mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

Cette invention se rapporte à un réseau de micro-miroirs qui est utile notamment dans un modulateur spatial de lumière réflectif. Dans un mode de réalisation, ce réseau de micro-miroirs comprend des parois de support d'espacement, une charnière à torsion verticale et une plaque miroir, qui sont tous fabriqués à partir d'une seule plaquette. Ce réseau de micro-miroirs se caractérise par un taux de remplissage élevé.

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