Scaled adaptive lithography

Details Scaled adaptive lithography Scaled adaptive lithography

H - Electricity

01

L

H01L 21/70 (2006.01) H01L 21/98 (2006.01) H01L 23/538 (2006.01)

Patent

CA 2176880

An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed--through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed--through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.

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