Semiconductor device having a semiconductor-on-insulator...

H - Electricity – 01 – L

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H01L 29/15 (2006.01) H01L 29/04 (2006.01) H01L 29/10 (2006.01) H01L 29/786 (2006.01)

Patent

CA 2612243

A semiconductor device may include a substrate, an insulating layer on the substrate, and a semiconductor layer on the insulating layer on a side thereof opposite the substrate. The semiconductor device may further include a superlattice on the semiconductor layer on a side thereof opposite the insulating layer. The superlattice may include a plurality of stacked groups of layers, with each group comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon. The at least one non-semiconductor monolayer may be constrained within a crystal lattice of adjacent base semiconductor portions.

La présente invention concerne un dispositif semi-conducteur pouvant comprendre un substrat, une couche isolante sur le substrat et une couche semi-conductrice sur la couche isolante sur un côté de celle-ci opposé au substrat. Le dispositif semi-conducteur peut comprendre en outre un super-réseau sur la couche semi-conductrice sur un côté de celle-ci opposé à la couche isolante. Le super-réseau peut comprendre une pluralité de groupes empilés de couches, chaque groupe comprenant une pluralité de monocouches semi-conductrices de base empilées définissant une partie semi-conductrice de base et au moins une monocouche non semi-conductrice sur celle-ci. La monocouche non semi-conductrice peut être contrainte dans un réseau cristallin de parties semi-conductrices de base adjacentes.

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