Semiconductor supercapacitor system, method for making same...

H - Electricity – 01 – G

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H01G 4/12 (2006.01) B32B 17/00 (2006.01) H01L 21/3205 (2006.01)

Patent

CA 2263357

The invention relates to a nanostructured BaTiO3 film, plate or array that has from 1,000 to 10,000 times the storage capacity of conventional capacitors. The barium titanates are of the formula BaaTibOc wherein a and b are independently between 0.75 and 1.25 and c is 2.5 to about 5Ø The barium titanates may further be doped with a material, "M", selected from Au, is Au, Cu, Ni3Al, Ru or InSn. The resulting titanate may be represented by the formula MdBaaTibOc wherein d is about 0.01 to 0.25, a is about 0.75 to about 1.25, b is about 0.75 to about 1.25 and c is about 2.5 to about 5Ø X-ray diffraction results illustrate that the crystal structure of the thin films changed from predominantly cubic to tetragonal phase and crystallite size increased with increasing concentration of "M".

L'invention porte sur des films, des plaques ou des réseaux de BaTiO¿3? nanostructurés présentant 1 000 à 10 000 fois la capacité de stockage des condensateurs usuels. Les titanates de baryum sont représentés par la formule Ba¿a?Ti¿b?O¿c? où a et b sont compris indépendamment entre 0,75 et 1,25 et c, entre 2,5 et environ 5,0. Lesdits titanates peuvent de plus être dopés par un matériau "M" choisi parmi Au, Cu, Ni¿3?Al, Ru, ou InSn. Le titanate résultant peut être représenté par la formule M¿d?Ba¿a?Ti¿b?O¿c? où d est d'environ 0,01 à 0,25, a est d'environ 0,75 à 1,25, b est d'environ 0,75 à 1,25, c est d'environ 2,5 à environ 5,0. Des résultats obtenus par diffraction par les rayons X montrent que la structure cristalline des films minces est passée d'une phase majoritairement cubique à une phase tétragonale et que la taille de la cristallite croissait avec la concentration en "M".

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