Semiconductor wafer transport system in a clean room

Details Semiconductor wafer transport system in a clean room Semiconductor wafer transport system in a clean room

B - Operations, Transporting

65

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356/187

B65G 51/32 (2006.01) H01L 21/677 (2006.01) H01L 21/687 (2006.01)

Patent

CA 1271271

Abstract of the Disclosure A transfer system for transferring a SMIF pod (TM) in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms (TM), the arms disposed adjacent to a semiconductor processing apparatus for transferring wafers, carried in the wafer cassette, into and out of the semiconductor processing apparatus; a transfer tube disposed near the arms; a vehicle adapted to carry the pod and adapted to move within the transfer tube; evacuation mechanism for evacuating the transfer tube to produce a negative pressure within the transfer tube so that the vehicle is moved along an axis of the transfer tube due to the negative pressure; and at least one pair of conveying mechanisms for conveying the vehicle between the transfer tube and respective arms.

531391

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