Silicon carbonitride antireflective coating

Details Silicon carbonitride antireflective coating Silicon carbonitride antireflective coating

H - Electricity

01

L

H01L 31/0216 (2006.01) H01L 31/04 (2006.01) H01L 31/18 (2006.01)

Patent

CA 2645474

An antireflective coating for silicon-based solar cells comprising amorphous silicon carbonitride, wherein the amount of carbon in the silicon carbonitride is from 5 to 25%, a solar cell comprising the antireflective coating, and a method of preparing the antireflective coating.

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