C - Chemistry – Metallurgy – 03 – C
Patent
C - Chemistry, Metallurgy
03
C
C03C 15/00 (2006.01)
Patent
CA 2716131
A processing system includes a plurality of chucks, each of the chucks configured to support a substrate such that a bottom surface of the substrate is exposed, a track configured to guide the plurality of chucks along a continuous path, and a processing arrangement configured to process the bottom surface of each substrate when the track guides the respective chuck over the processing arrangement, the processing arrangement including a fluid meniscus arranged to contact the bottom surface of each substrate when the track guides the respective chuck over the processing arrangement.
Linvention concerne un système de traitement comprenant une pluralité de dispositifs de serrage, chacun des dispositifs de serrage étant configuré pour supporter un substrat de telle sorte quune surface inférieure du substrat soit exposée, une piste configurée pour guider la pluralité de dispositifs de serrage le long dun chemin continu, et un agencement de traitement configuré pour traiter la surface inférieure de chaque substrat lorsque la piste guide le dispositif de serrage respectif sur lagencement de traitement, lagencement de traitement comprenant un ménisque de fluide agencé pour entrer en contact avec la surface inférieure de chaque substrat lorsque la piste guide le dispositif de serrage respectif sur lagencement de traitement.
Materials And Technologies Corporation
Smart & Biggar
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