Spin castable mixtures useful for making deep-uv contrast...

Details Spin castable mixtures useful for making deep-uv contrast... Spin castable mixtures useful for making deep-uv contrast...

G - Physics

03

F

96/205, 400/7025

G03F 7/095 (2006.01) G03F 7/09 (2006.01) G09B 9/32 (2006.01) H01F 1/153 (2006.01)

Patent

CA 1328700

SPIN CASTABLE MIXTURES USEFUL FOR MAKING DEEP-UV CONTRAST ENHANCEMENT LAYERS ABSTRACT OF THE DISCLOSURE Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing .alpha.-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The .alpha.-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light.

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