Suscepter and process for production thereof

Details Suscepter and process for production thereof Suscepter and process for production thereof

C - Chemistry, Metallurgy

30

B

C30B 25/12 (2006.01) C04B 35/524 (2006.01) H01L 23/34 (2006.01)

Patent

CA 2141269

Disclosed are a suscepter composed substantially of vitreous carbon derived from polycarbodiimide resin; and a process for producing the susceptor by molding a polycarbodi- imide resin or a composition composed mainly thereof, into a shape of a suscepter and then carbonizing the molded material in vacuum or an inert gas atmosphere. The suscepter is free from problems of the prior art, has no pores on the surface, generates no impurity and causes no cracking when used at high temperatures.

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