Target designed to be vaporized by an electron beam, the...

C - Chemistry – Metallurgy – 23 – C

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C23C 14/30 (2006.01) C04B 35/48 (2006.01) C23C 14/08 (2006.01) C23C 14/22 (2006.01)

Patent

CA 2481932

L'invention concerne une cible composite en forme de barreau, formée de poudres céramiques et destinée à âtre évaporée sous faisceau d'électrons, comportant de la zircone et au moins un stabilisant de la zircone. De façon caractéristique, ladite cible est caractérisée en en ce que ledit stabilisant de la zircone est compris avec une teneur molaire comprise entre 2 et 30% et en ce que ladite zircone est formée à plus de 90% d'une phase monoclinique. Application à la fabrication d'une barrière thermique de faible conductivité thermique et de forte résistance thermomécanique en céramique formée par évaporation sous faisceau d'électrons.

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