Temperature controlled distributor beam for chemical vapor...

Details Temperature controlled distributor beam for chemical vapor... Temperature controlled distributor beam for chemical vapor...

C - Chemistry, Metallurgy

03

C

32/23

C03C 17/00 (2006.01) C23C 16/453 (2006.01)

Patent

CA 1332281

ABSTRACT A distributor beam for depositing coating material on the surface of a sheet of glass includes a plenum for each gas to be mixed. The plenums are surrounded by a cooling fluid duct and heating elements are provided for temperature control. Thermocouples generate signals representing actual temperatures and the heaters are controlled to maintain an optimum temperature for the gases as they flow from the plenums through a mixing chamber to the surface of the glass sheet which is located below an outlet from the mixing chamber. Fastener means apply increased clamping pressure to the beam structure as the temperature increases to increase the rate of heat transfer to the cooling fluid.

610445

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