C - Chemistry – Metallurgy – 03 – C
Patent
C - Chemistry, Metallurgy
03
C
261/19, 49/88
C03C 3/091 (2006.01) C03C 17/06 (2006.01) C03C 23/00 (2006.01) H01L 21/48 (2006.01) H01L 23/15 (2006.01) H05K 3/10 (2006.01) H05K 1/03 (2006.01)
Patent
CA 1320507
Abstract of the Disclosure There is disclosed a method of producing a transition metal pattern on a glass or glass-ceramic substrate by selective exudation of a transition metal from a glass substrate containing the metal as an oxide. The selective exudation is effected by applying an intense, well-focused source of energy to a glass in a pattern corresponding to the desired metal pattern. This develops localized heating, and thereby causes corresponding localized metal exudation from the glass. The metal pattern may be rendered electroconductive, and may constitute a pattern of interconnecting lines for microcircuitry. There is also disclosed a family of low dielectric, copper-exuding, boroaluminosilicate glasses particularly adapted to use in forming substrates for electronic devices such as integrated circuits. The glasses are capable of exuding copper oxide, have a coefficient of thermal expansion of 30 - 35 x 10-7 at 300°C, a dielectric constant not over 5.0 at 100 KHz, a loss tangent not over 0.003 at 100 KHz and consist essentially, in percent by weight, of 56 - 64% SiO2, 18 - 25% B2O3, 3-11% Al203, 0-2% CaO, 0 - 2% Li2O, 0 - 1% K2O, and Li2O + K2O + CaO being 1.5 - 3% and 1 - 20% CuO.
577512
Boylan Elizabeth A.
Fong Gerald D.
Hultman Sheryl L.
Corning Incorporated
Gowling Lafleur Henderson Llp
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