Three dimensional micromachined electromagnetic device and...

H - Electricity – 01 – Q

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H01Q 1/36 (2006.01) G01J 5/20 (2006.01) H01Q 1/08 (2006.01) H01Q 9/32 (2006.01) H01Q 11/08 (2006.01) H01Q 21/06 (2006.01)

Patent

CA 2328708

A micro-electromagnetic device having a three dimensional structure is formed using laser chemical vapor deposition on a conductive surface. Arrays of electromagnetic devices may be formed. Various techniques for facilitating deposition on the conductive surface may be used. A helical antenna for use in the THz region may be formed in accordance with the laser chemical vapor deposition. The antenna is preferably formed on a bolometer.

Selon l'invention, on forme ce dispositif micro-électromagnétique possédant une structure tridimensionnelle en utilisant un dépôt en phase vapeur, par laser, sur une surface conductrice. On peut former des groupes de dispositifs électromagnétiques, et on peut utiliser diverses techniques destinées à faciliter ce dépôt sur la surface conductrice. On peut former une antenne hélicoïdale, utile dans la gamme de fréquences THz, selon la technique du dépôt en phase vapeur, par laser, cette antenne étant, de préférence, formée sur un bolomètre.

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