Transparent conductive oxide coating for thin film...

C - Chemistry – Metallurgy – 03 – C

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C03C 17/34 (2006.01) C23C 14/08 (2006.01) C23C 14/58 (2006.01)

Patent

CA 2704389

The present invention provides transparent conductive oxide (TCO) thin films with improved optical and electrical properties and methods of making the same. More specifically, the invention provides on-line processes for producing TCO thin films that allow for improvements in optical properties and post-production improvements in electrical properties of the TCO.

La présente invention porte sur des couches minces d'oxyde conducteur transparent (TCO) présentant des propriétés optiques et électriques améliorées et sur des procédés permettant de les fabriquer. Plus spécifiquement, l'invention porte sur des procédés en ligne pour obtenir des couches minces de TCO qui permettent des améliorations dans les propriétés optiques et des améliorations de post-production dans les propriétés électriques du TCO.

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