Two-dimensional micro-mirror array enhancements

Details Two-dimensional micro-mirror array enhancements Two-dimensional micro-mirror array enhancements

G - Physics

02

B

G02B 26/00 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2400294

A micro-mirror strip assembly having a plurality of two-dimensional micro- mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

L'invention concerne un ensemble ruban de micromiroirs qui comprend plusieurs structures de micromiroirs bidimensionnelles présentant des caractéristiques de déviation et autres améliorées. Dans les structures de micromiroirs, des électrodes de déviation électrostatique sont disposées en entités coniques ou quasi coniques usinées, fixées ou moulées dans un substrat. Les électrodes sont disposées en quartiers approximativement parallèles ou décalés de 45 degrés relativement à des axes de rotation afin de former des quadrants. Des détecteurs à torsion sont disposés les long des axes de rotation pour contrôler la déviation des électrodes de déviation à quadrants.

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