Ultrahigh purity silane and silicon production with recycle...

C - Chemistry – Metallurgy – 01 – B

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C01B 33/04 (2006.01) C01B 33/029 (2006.01)

Patent

CA 1155636

12715 ULTRAHIGH PURITY SILANE AND SILICON PRODUCTION WITH RECYCLE FROM SEPARATION COLUMNS Abstract of the Disclosure Tri-and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated. S P E C I F I C A T I O N -1-

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