G - Physics – 01 – L
Patent
G - Physics
01
L
73/58
G01L 1/25 (2006.01) G01B 11/16 (2006.01) G01D 5/26 (2006.01)
Patent
CA 1333752
A novel interferometer and method of determining incremental movement are provided herein. The interferometer includes a source of a laser beam of radiant energy; a beam splitter disposed across the path of the beam of radiant energy for splitting the beam into reflected beams and transmitted beams; a reflector for receiving or reflecting a beam of radiant energy which has been reflected by the beam splitter; an optical recording device disposed in the path of a beam reflected by the beam splitter; a rigid cantilevered arm having a coating thereon whose incremental movement is to be measured; and a mirror, mounted on the cantilevered arm, for reflecting a beam of radiant energy reflected by the beam splitter. The incremental movement is measured by a determination of the movement of an interference pattern produced by interference of the two beams of the radiant energy. The interferometer is capable of measuring a deflection of at least 1/20th of a wave-length of light (?300.ANG. or 30 nm) in an arm, e.g. of stainless steel, with the sensitivity being dependent on the size of the steel arm. A long steel arm increases the sensitivity, while a thicker steel arm decreases it.
557749
Borden Ladner Gervais Llp
O'brien Robert N.
LandOfFree
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