Valve and micropump incorporating said valve

Details Valve and micropump incorporating said valve Valve and micropump incorporating said valve

A - Human Necessities

61

M

A61M 1/00 (2006.01) F04B 43/04 (2006.01) F04B 53/10 (2006.01) F15C 5/00 (2006.01)

Patent

CA 2065735

2065735 9201160 PCTABS00010 A valve is formed by machining a silicon wafer (18) bonded to a glass wafer (2). This machining forms a membrane (44) and a sealing ring. Part of the surface of the membrane (44) and optionally the sealing ring are oxidised in order to impart a mechanical pre-tension to the membrane holding the valve in a closed position. Further etching (52) may be carried out in a manner such that in the absence of the aforesaid pre-tension the valve is in the open position at rest.

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