H - Electricity – 01 – G
Patent
H - Electricity
01
G
H01G 7/00 (2006.01) G01D 5/241 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01) G01P 15/13 (2006.01)
Patent
CA 2183477
A small variable capacitor which provides a large electrostatic capacity, whose variability of the electrostatic capacity is large, and has an excellent electrical strength and a high Q value which indicates an index of performance of the capacitor, even though it is a single element, is provided. One end of a movable section composing a movable electrode is supported by a supporting section. A driving electrode and a detecting electrode are provided facing to the movable electrode. When an external bias voltage is applied between the movable electrode and the driving electrode, Coulomb force is generated between them. Due to that, the movable section is attracted toward the driving electrode while keeping a balance between its own resilience (stability) and the Coulomb force. At this time, part of the movable section facing to the detecting element is displaced more than the other part of the movable section facing to the driving electrode. That is, an average distance between the movable section and the detecting electrode becomes narrower as compared to an average distance between the movable section and the driving electrode. Thereby, because an electrostatic capacity between the movable section and the detecting electrode is inversely proportional to the average distance, a large electrostatic capacity may be obtained and a variability of the electrostatic capacity becomes large.
Mccarthy Tetrault Llp
Murata Manufacturing Co. Ltd.
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