X-ray exposure apparatus

Details X-ray exposure apparatus X-ray exposure apparatus

H - Electricity

05

G

H05G 1/00 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2079562

An X-ray apparatus is disclosed which includes a mirror having a reflection surface, for expanding an X-ray beam in a predetermined direction, a detecting device for detecting a relative positional relationship between the X-ray beam and the reflection surface with respect to a direction perpendicular to the reflection surface, and an adjusting device for adjusting the relative position of the X-ray beam and the reflection surface on the basis of the detection. Also disclosed is an exposure apparatus and a semiconductor device manufacturing method using the X- ray apparatus.

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