Silicon-glass-silicon capacitive pressure transducer

Details Silicon-glass-silicon capacitive pressure transducer Silicon-glass-silicon capacitive pressure transducer

H - Electricity

01

G

356/26, 73/3

H01G 7/00 (2006.01) G01L 1/14 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1185454

- 14 - Silicon-Glass-Silicon Capacitive Pressure Transducer Abstract A silicon capacitive pressure transducer 34 comprising two wafers of silicon 14, 32 separated by borosilicate glass 18, 21, one of the wafers 14 having a borosilicate glass pedestal 26 thereon which is metallized 30 to provide one plate of a capacitor, the other plate of which is the surface of one of the silicon wafers 32. The distance between the upper surface of the glass pedestal and the lower surface of the silicon wafer is de- fined by a portion 18 of the borosilicate glass, the portion 21 of borosilicate glass being the same height as that of the glass pedestal 26. An embodiment of a transducer 34b employs a silicon pedestal 26b, wherein the glass portion 21b only provides separation of the silicon wafers 14b, 32b with lower parasitic capacitance.

413169

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