Substrate and method of manufacturing substrate

Details Substrate and method of manufacturing substrate Substrate and method of manufacturing substrate

H - Electricity

01

L

H01L 21/02 (2006.01) G01V 8/12 (2006.01) H01L 21/306 (2006.01) H01L 21/66 (2006.01)

Patent

CA 2746568

A substrate, the presence of which can be detected with a method similar to a conventional method of detecting a Si substrate even if the substrate is transparent, and a method of manufacturing the substrate are provided. Light (10) incident on an end portion of a transparent substrate (1) is not transmitted through the substrate (1) as with the light (10) incident on a central portion of the substrate (1), but is totally reflected from a total reflection surface (2) in a detection region present in at least a portion of the end portion of the substrate (1). A photoelectric sensor (30) can recognize that a ratio of transmission of the light (10) at the end portion of the substrate (1) has become smaller, thereby detecting the presence of the substrate (1).

L'invention porte sur un substrat, dont l'existence peut être détectée à l'aide d'un procédé similaire à celui utilisé pour des substrats Si classiques même lorsque le substrat est transparent, et sur un procédé de fabrication du substrat. Un faisceau (10) incident sur la partie d'extrémité d'un substrat transparent (1) ne passe pas à travers le substrat (1), contrairement à un faisceau (10) qui est incident sur la partie centrale du substrat (1) et est totalement réfléchi par une surface totalement réfléchissante (2) dans une région de détection existant au moins sur une partie de la partie d'extrémité du substrat (1). L'existence du substrat (1) peut être détectée en amenant un capteur photoélectrique (30) à reconnaître la réduction de la proportion du faisceau (10) passant à travers la partie d'extrémité du substrat (1).

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