Glass-aluminum nitride composite material

Details Glass-aluminum nitride composite material Glass-aluminum nitride composite material

C - Chemistry, Metallurgy

03

C

C03C 14/00 (2006.01) C04B 35/58 (2006.01) C04B 35/80 (2006.01) H01L 23/15 (2006.01)

Patent

CA 2060239

A glass-aluminum nitride composite comprising a sintered body is produced by adding glass powder to aluminum nitride grains having an oxygen content of less than 2% and a mean grain diameter of 1.0 µm or more and subjecting the mixture to molding and sintering. A suitable glass is one based on borosilicate and the addition of an AlN whisker serves to improve the strength. The composite material of the present invention has a high heat conductivity, a low permittivity and a high strength and is suitable as a semiconductor packaging material.

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