Silicon oxide based thin film vapour barriers

Details Silicon oxide based thin film vapour barriers Silicon oxide based thin film vapour barriers

C - Chemistry, Metallurgy

23

C

C23C 14/10 (2006.01) C23C 16/40 (2006.01) C23C 16/52 (2006.01)

Patent

CA 2048168

ABSTRACT A flexible polymer substrate, particularly useful for medical or food packaging applications, defines a surface that carries a thin film. The surface and thin film together have a permeability to oxygen gas that is less than about 0.1 cc/100in2/day. The thin film has a thickness less than about 1000 .ANG.. The thin film includes a substantially inorganic silicon oxide. The film is deposited in a previously evacuated chamber by glow discharge from a gas stream that includes a volatilized organosilicon component, an oxygen component, and an inert gas component.

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