B - Operations – Transporting – 81 – B
Patent
B - Operations, Transporting
81
B
B81B 5/00 (2006.01) B81C 1/00 (2006.01)
Patent
CA 2633534
A process of manufacturing parallel-plate microstructures by integrating the microstructures in a chip using a CMOS process is provided. A MEMS variable capacitor, a tunable band-pass filter, tunable matching networks, and capacitive RF-MEME switches all having vertically movable components and are integrated into a chip.
Bakri-Kassem Maher
Fouladi Azarnaminy Siamak
Mansour Raafat R.
Bakri-Kassem Maher
Fouladi Azarnaminy Siamak
Mansour Raafat R.
Schnurr Daryl W.
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