A manufacturing method of a microchemical chip made of a...

A method of fabrication of micro-devices

A micro-electro-mechanical-system two dimensional mirror...

A microfluidic device and method for fabricating the...

A microfluidic pipetting system for micro-dosing biological...

Acoustically actuated mems devices

Actuator element

Actuator in a microfluidic system for inducing...

Actuator on the basis of geometrically anisotropic...

Actuators including serpentine arrangements of alternating...

Aligning device for assembling microsystems

Apparatus and methods for arranging devices into an...

Apparatus for downhole fluids analysis utilizing micro...

Articulated mems structures

Attaching and fixing components to mems type structures

Bi-direction rapid action electrostatically actuated microvalve

Bi-stable micro-actuator and optical switch

Bubble-actuated valve with latching

Calibrating a micro electro-mechanical device

Cantilever with pivoting actuation