4. B - Operations, Transporting
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Packaging micromechanical devices

B - Operations – Transporting – 81 – C
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Patch production

B - Operations – Transporting – 81 – C
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Photo-sensitive mems structure

B - Operations – Transporting – 81 – B
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Piano mems micromirror

B - Operations – Transporting – 81 – B
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Piano mems with hidden hinge

B - Operations – Transporting – 81 – B
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Polysilicon microelectronic reflectors and beams and methods...

B - Operations – Transporting – 81 – C
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Portable etch chamber

B - Operations – Transporting – 81 – C
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Procedure for manufacturing a microelectromechanical optical...

B - Operations – Transporting – 81 – B
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Process for fabricating a micro-electro-mechanical system...

B - Operations – Transporting – 81 – B
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Process for fabricating a microfluidic device

B - Operations – Transporting – 81 – B
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Process for manufacturing micromechanical devices containing...

B - Operations – Transporting – 81 – C
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Processes for rapid microfabrication using thermoplastics...

B - Operations – Transporting – 81 – C
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Production method for micro-machine

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Production of diaphragms

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Production of microfluidic devices using laser-induced...

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