Production of diaphragms

Details Production of diaphragms Production of diaphragms

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) B41J 2/16 (2006.01) B81B 3/00 (2006.01)

Patent

CA 2351285

A method of manufacturing a diaphragm utilising a precision grinding technique after etching a cavity in a wafer. A technique for preventing distortion of the diaphragm based on use of a sacrificial layer of porous silicon is disclosed.

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