A manufacturing method of a microchemical chip made of a...
A microfluidic device and method for fabricating the...
A microfluidic pipetting system for micro-dosing biological...
Aligning device for assembling microsystems
Attaching and fixing components to mems type structures
Calibrating a micro electro-mechanical device
Carbon nanotube synthesis for nanopore devices
Counter-balanced mems mirror with hidden hinge
Customized lithographic particles
Decal transfer microfabrication
Device and use thereof
Dissipation of a charge buildup on a wafer portion
Electrical microvalve and method of manufacturing thereof
Electrothermally-driven mems microgrippers with integrated...
Encapsulation process for microelectromechanical structures
Fabrication and use of submicron wide suspended structures
Fabrication of metallic microstructures via exposure of...
Flexible microstructured superhydrophobic materials
Gold thiolate and photochemically functionalized...
Hermatic firewall for mems packaging in flip-chip bonded...