Carbon nanotube synthesis for nanopore devices

B - Operations – Transporting – 81 – C

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B81C 1/00 (2006.01)

Patent

CA 2700862

In a process for fabricating a nanopore device, at least one carbon nanotube catalyst region is formed on a struc-ture. A plurality of nanopores is formed in the structure at a distance from the catalyst region that is no greater than about an ex-pected length for a carbon nanotube synthesized from the catalyst region. Then at least one carbon nanotube is synthesized from the catalyst region. This fabrication sequence enables the in situ synthesis of carbon nanotubes at the site of nanopores, whereby one or more nanotubes articulate one or more nanopores without requiring manual positioning of the nanotubes.

Dans le processus de fabrication d'un dispositif à nanopores, on forme sur une structure au moins une zone catalytiqie de nanotubes de carbone. Un ensemble de nanopores est formé dans la structure à une certaine distance de la zone catalytique non supérieure à la longueur approximative attendue d'un nanotube de carbone synthétisé à partir de la zone catalytique. Un nanotube de carbone au moins est alors synthétisé à partir de la zone catalytique. Cette séquence de fabrication permet la synthèse in situ de nanotubes de carbone sur le site des nanopores. Ainsi, un ou plusieurs nanotubes produisent un ou plusieurs nanopores sans nécessiter le positionnement manuel des nanotubes.

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