Counter-balanced mems mirror with hidden hinge

Details Counter-balanced mems mirror with hidden hinge Counter-balanced mems mirror with hidden hinge

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) B81B 5/00 (2006.01) B81B 7/02 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2726409

A multi-layer hidden hinge and actuator design for high fill factor biaxial mems mirror array for wavelength selective switches (wss) based on a silicon-on-insulator (soi) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a mems linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in soi structure and then bonding them together.

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