Electrothermally-driven mems microgrippers with integrated...

Details Electrothermally-driven mems microgrippers with integrated... Electrothermally-driven mems microgrippers with integrated...

B - Operations, Transporting

81

C

B81C 1/00 (2006.01) B81B 3/00 (2006.01) B82B 3/00 (2006.01)

Patent

CA 2551191

The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two- axis force sensing capabilities.

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