Aligning device for assembling microsystems

B - Operations – Transporting – 81 – C

Patent

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Details

B81C 3/00 (2006.01) G02B 21/00 (2006.01) H01L 21/50 (2006.01)

Patent

CA 2361715

The invention concerns an aligning device for assembling microsystems and for the micro-dispensing on microsystems or on micro-biotechnological components. It concerns a device for aligning very accurately two components to be assembled or a microbiological component (a biochip) with an assembly of micro-buses for dispensing liquid products. It consists of a sighting system (22), a transparent planar parallel plate (24) provided on one of its surfaces with semi-reflecting coating, a mechanical device (11) for maintaining a component (1), the plate (24) whereof the normal merges with the sighting system (22) optical axis, forming on the substrate top surface the virtual image B' of the bottom surface B of the component (1), the optical system (22) forming in its image plane (23) two real images A' and B'' of the top surface A of the substrate (2) and of the bottom surface B of the component (1). The inventive device is particularly designed for assembling electromechanical or micro-opto-electromechanical modules, accurate setting of droplets on a biological micro-component (biochip).

Dispositif d'alignement pour l'assemblage de micro systèmes et pour la micro distribution sur micro systèmes ou sur micro composants bio-technologiques. L'invention concerne un dispositif destiné à aligner de manière très précise deux composants en vue de leur assemblage ou un micro composant biologique (bio puce) avec une ou un ensemble de micro buses de distribution de produits liquides. Il est constitué un système de visée (22), une lame plane parallèle (24) transparente pourvue sur l'une de ces faces d'un traitement semi réfléchissant, un dispositif mécanique (11) de maintien d'un composant (1), la lame (24) dont la normale est confondue avec l'axe optique du système de visée (22), formant sur la face supérieure d'un substrat (2) l'image virtuelle B' de la face inférieure B du composant (1), le système optique (22) formant alors dans son plan image (23) deux images réelles A' et B'' de la face supérieure A du substrat (2) et de la face inférieure B du composant (1). Le dispositif selon l'invention est particulièrement destiné à l'assemblage de modules électro mécaniques ou micro opto électro mécaniques, la dépose précise de gouttelettes sur un micro composant biologique (bio puce).

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