Packaging micromechanical devices

Details Packaging micromechanical devices Packaging micromechanical devices

B - Operations, Transporting

81

C

B81C 3/00 (2006.01) B81C 99/00 (2010.01) B81B 7/00 (2006.01)

Patent

CA 2342409

The specification describes packaging assemblies for micro-electronic machined mechanical systems (MEMS). The MEMS devices in these package assemblies are based on silicon MEMS devices on a silicon support and the MEMS devices and the silicon support are mechanically isolated from foreign materials. Foreign materials pose the potential for differential thermal expansion that deleteriously affects optical alignment in the MEMS devices. In a preferred embodiment the MEMS devices are enclosed in an all- silicon chamber. Mechanical isolation is also aided by using a pin contact array for interconnecting the silicon support substrate for the MEMS devices to the next interconnect level. The use of the pin contact array also allows the MEMS devices to be easily demountable for replacement or repair.

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