B - Operations – Transporting – 81 – C
Patent
B - Operations, Transporting
81
C
B81C 99/00 (2010.01) G01P 15/00 (2006.01) G01P 15/13 (2006.01) H01L 29/06 (2006.01)
Patent
CA 2371669
A method of producing a floating sphere type measuring device having a floatable sphere and electrodes surrounding the sphere, comprising the steps of forming a first sacrificing film on the surface of the sphere, forming electrode patterns consisting of a conductive film on the first sacrificing film, forming a second sacrificing film so as to cover the electrode patterns- formed first sacrificing film, forming groove patterns in the second sacrificing film to expose the electrode patterns, forming an insulating film for connection between a plurality of exposed electrode patterns, and removing the first and second sacrificing films.
L'invention concerne un procédé de fabrication d'un dispositif de mesure à sphère flottante, comprenant une sphère flottante et des électrodes entourant la sphère. Ledit procédé consiste à former un premier film sacrificiel sur la surface de la sphère, à former des modèles d'électrodes comprenant un film conducteur sur le premier film sacrificiel, à former un second film sacrificiel de manière à couvrir le premier film sacrificiel formé de modèles d'électrodes, à former des modèles de rainures dans le second film sacrificiel servant à exposer les modèles d'électrodes, à former un film isolant servant à connecter plusieurs modèles d'électrodes exposés, et à retirer le premier et le second film sacrificiels.
Esashi Masayoshi
Murakoshi Takao
Nakamura Shigeru
Takeda Nobuo
Ball Semiconductor Limited
Esashi Masayoshi
Gowling Lafleur Henderson Llp
Tokimec Inc.
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