Piano mems with hidden hinge

Details Piano mems with hidden hinge Piano mems with hidden hinge

B - Operations, Transporting

81

B

B81B 5/00 (2006.01) B81B 7/02 (2006.01) B81C 1/00 (2006.01) G02B 7/182 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2584145

The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. the hinge structure includes first and second hinges and a gimbal ring fabricated in a single layer beneath the platform layer. one end of the hinge structure extends from the undersurface of the platform, while the other end extends from a pedestal, which extends upwardly from a substrate.

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