A method of fabrication of micro-devices

A micro-electro-mechanical-system two dimensional mirror...

Acoustically actuated mems devices

Actuator element

Actuator in a microfluidic system for inducing...

Actuator on the basis of geometrically anisotropic...

Actuators including serpentine arrangements of alternating...

Apparatus and methods for arranging devices into an...

Apparatus for downhole fluids analysis utilizing micro...

Articulated mems structures

Bi-direction rapid action electrostatically actuated microvalve

Bi-stable micro-actuator and optical switch

Bubble-actuated valve with latching

Cantilever with pivoting actuation

Capillary stop

Ceramic microelectromechanical structure

Compression and cold weld sealing methods and devices

Controlled fluid transport in microfabricated polymeric...

Controlling electromechanical behavior of structures within...

Controlling peel strength of micron-scale structures